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Development of a room temperature thin film In203, ZnO and SnO2 ozone sensor

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conference contribution
posted on 2011-07-01, 16:10 authored by Khalil Arshak, Ger Hickey, Edward Forde, John A. Harris
Thin films of Indium-zinc-tin oxide have been prepared by Vacuum Thermal Evaporation (VTE). The sensing characteristics of these films to environmentally relevant ozone concentrations were studied at room temperature. The effects of film thickness, deposition rate and annealing were investigated. The resistance of the thin film was found to be inversely proportional to the deposition rate. The highest sensitivity of the ozone sensors was found at a deposition rate of 1.2 nm/s - 1.4 nm/s. In addition the 03 sensors were found to perform best with a 40 nm thick sensing layer. In203, ZnO and SnO2 were deposited on alumina substrates containing interdigitated electrodes by means of VTE. These results have shown that ln203:ZnO:SnO2 thin films prepared by VTE method are promising for room temperature ozone sensing.

History

Publication

ISIE 2007 International Symposium;

Publisher

IEEE Computer Society

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peer-reviewed

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©2008 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.

Language

English

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