University of Limerick
Browse
Tanner_2016_analysis.pdf (1.39 MB)

An analysis of germanium-silicon/silicon strained superlattice structure using convergent beam electron diffraction

Download (1.39 MB)
journal contribution
posted on 2022-08-25, 09:57 authored by Naga Vishnu V. Mogili, DAVID TANNERDAVID TANNER, Shohei Nakahara
Strained superlattices (SSLs) are typically found inside the p-n junction area of semiconductor devices and consist of very thin alternating layers of different material. There exists a small lattice mismatch between these materials which results in localised strain, as in the case of germanium-silicon/silicon SSLs. Strain measurements using a convergent beam electron diffraction (CBED) technique inside a transmission electron microscope (TEM) have indicated that the strain measured normal to these germanium-silicon/silicon SSLs varies almost sinusoidally, in spite of theoretical predictions which indicate a much sharper change in strain between these layers. A theoretical formulation involving an elasticity solution has been developed to predict the strain inside these SSL structures. The comparison of theoretical and experimental results clearly quantifies the effect of beam size on the spatial resolution of CBED measurements. Given that beam size is critically dependent on the spot size of the beam, the convergence angle, the specimen thickness and the position of the focused plane, these parameters are all clearly accounted for in the theoretical predictions.

History

Publication

Strain;52, (2), pp. 162-171

Publisher

Wiley & Sons

Note

peer-reviewed

Other Funding information

Irish Government’s Programme for Research in Third Level Institutions, Cycle 4

Rights

This is the author's version of the following article "An analysis of germanium-silicon/silicon strained superlattice structure using convergent beam "The definitive version is available at http://dx.doi.org/10.1111/str.12176

Language

English

Usage metrics

    University of Limerick

    Categories

    No categories selected

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC