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Development of a novel humidity sensor with error-compensated measurement system
Date
2002
Abstract
This paper documents the creation of a complete PC-Based humidity sensing system, implemented using LabVIEW from National Instruments. The humidity sensor, which has a measured sensitivity of 0.25%/RH%, is manufactured by thin film technology from a novel combination of SiO/In2O3. Both the humidity sensor and a standard temperature sensor are interfaced to a PC using a front-end signal conditioning circuit. The entire system has been analyzed mathematically and the necessary algorithms for error-compensation have been developed. The resulting measurement system is efficient, accurate and flexible.
Supervisor
Description
peer-reviewed
Publisher
IEEE Computer Society
Citation
Microelectronics, 2002. MIEL 2002. 23rd International Conference;1, pp. 215-218