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Electro-thermo-optical modulation of silicon nitride integrated photonic filters for analog applications
Date
2026-02-03
Abstract
High-quality spectral filters with versatile tuning mechanisms are essential for applications in photonic integrated circuits, including sensing, laser stabilization, and spectral signal processing. We report the implementation of thermo-optic (TO) and electro-optic (EO) spectral tuning in silicon nitride Mach–Zehnder interferometers (MZIs) and micro-ring resonators (MRRs) by functionalizing the devices with a PMMA:JRD1 polymer cladding and integrating titanium tracks as heaters and electrodes. The fabricated MZIs and MRRs exhibit narrow linewidths of 25–30 pm and achieved TO tuning efficiencies of 1.7 and 13 pm/mW and EO tuning efficiencies of 0.33 and 1.6 pm/V, respectively. Closed-loop regulation using TO and EO effects enables stable half-fringe locking under environmental perturbations. This simple, broadly compatible hybrid platform demonstrates a practical approach to dual-mode spectral tuning and modulation in integrated photonic filters, providing a flexible route toward compact, reconfigurable, and environmentally robust photonic circuits.
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Publisher
MDPI
Citation
Photonics 13, 149
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Funding Information
Sustainable Development Goals
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Attribution-NonCommercial-ShareAlike 4.0 International