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Development of a room temperature thin film In203, ZnO and SnO2 ozone sensor
Date
2007
Abstract
Thin films of Indium-zinc-tin oxide have been prepared by Vacuum Thermal Evaporation (VTE). The sensing characteristics of these films to environmentally relevant ozone concentrations were studied at room temperature. The effects of film thickness, deposition rate and annealing were investigated. The resistance of the thin film was found to be inversely proportional to the deposition rate. The highest sensitivity of the ozone sensors was found at a deposition rate of 1.2 nm/s - 1.4 nm/s. In addition the 03 sensors were found to perform best with a 40 nm thick sensing layer. In203, ZnO and SnO2 were deposited on alumina substrates containing interdigitated electrodes by means of VTE. These results have shown that ln203:ZnO:SnO2 thin films prepared by VTE method are promising for room temperature ozone sensing.
Supervisor
Description
peer-reviewed
Publisher
IEEE Computer Society
Citation
ISIE 2007 International Symposium;
Collections
Files
Keywords
Funding code
Funding Information
Sustainable Development Goals
External Link
Type
Meetings and Proceedings
Rights
https://creativecommons.org/licenses/by-nc-sa/1.0/