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Full-field heterodyne interferometry using a complementary metal-oxide semiconductor digital signal processor camera for high-resolution profilometry

Date
2007
Abstract
We describe a heterodyne interferometry system based on a complementary metal-oxide semiconductor digital signal processor (CMOS-DSP) camera that is utilized for full-field optical phase measurement using a carrier-based phase retrieval algorithm, with no need for electro-mechanical scanning. Camera characterization test results support the adoption of a single-pixel approach to perform quasiinstantaneous differential phase measurements, which are immune to mechanical vibrations and thermal drifts. We developed an optical configuration based on a Mach-Zehnder heterodyne interferometer to perform a static test on a mirror surface. The profiles of the mirror surface set at two angular positions, the relative displacements in the range of nanometers, and the corresponding tilt angle were determined.
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Description
peer-reviewed
Publisher
Society of Photo-Optical Instrumentation Engineers (SPIE)
Citation
Optical Engineering;46/ 9/ pp. 095601-5
Collections
Electronic & Computer Engineering
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Connelly_full_field.pdf
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Keywords
metrology, interferometry, signal processing, cameras
ULRR Identifiers
https://hdl.handle.net/10344/1113
 https://doi.org/10.34961/3990
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Funding Information
Sustainable Development Goals
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