Loading...
Design and simulation of a saw gas sensor for detection of methane and nitric oxides
Date
2024
Abstract
The paper aims to design and simulate a MEMS based surface acoustic waves (SAW) gas sensor for nitric oxides and methane detection. The main advantage of SAW sensors is they have good power management and so could be used in Internet of Things applications. Four different designs for a SAW sensor were simulated using Quanscient Allsolve Multiphysics software. Three of these designs yielded results that were satisfactory, which will lead to their fabrication. The gas sensor was designed for wide frequency range of 50 MHz to 250 MHz. Each gas a particular frequency for detection. Here the authors have tried to understand the method to design and simulate for different types of ITDs for different gases by changing the IDT dimensions and types. It has been found that the focused IDTs are not suitable for sensing as compared to conventional, Dummy electrode and Apodized type of IDT.
Supervisor
Description
Publisher
University of Limerick
Citation
20th Sensors and Their Applications Conference, 2024, Paper No: 25
Collections
Files
Loading...
Paper_25.pdf
Adobe PDF, 366.65 KB
Funding code
Funding Information
This work was carried out under the SFI CONNECT funding and the authors would like to thanks the funding agency for the support. The future work will be carried out by the Nanotechnology / SAFE Cluster under the SFI CONNECT funding.
Sustainable Development Goals
External Link
Type
Meetings and Proceedings
Rights
https://creativecommons.org/licenses/by-nc-sa/4.0/